Fundamentals of microelectromechanical 
Kim, Eun Sok. 
 -  McGraw Hill LLC.  2021 
 - xviii, 396 pages 
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<br/><br/><label>ISBN: </label>978-1-26425758-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Dewey Class. No.: </label>621.3 K491 2021