000 00426nam a2200145Ia 4500
008 250428s9999 xx 000 0 und d
082 _a621.3815 H 23617
245 0 _aHandbook of 3d integration technology and applications of 3d integrated circuits
245 0 _cGarrou Philip
260 _bDeutsche nationalbibliothek
300 _axxvi,773pages
526 _a600 Technology (App Sciences)
942 _2DDC
942 _cB
999 _c12899
_d12899