| 000 | 00477nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 250428s9999 xx 000 0 und d | ||
| 020 | _a978-1-26425758-4 | ||
| 082 | _a621.3 K491 2021 | ||
| 245 | 0 | _aFundamentals of microelectromechanical | |
| 245 | 0 | _cKim, Eun Sok. | |
| 260 | _bMcGraw Hill LLC. | ||
| 260 | _c2021 | ||
| 300 | _axviii, 396 pages | ||
| 526 | _a600 Technology (App Sciences) | ||
| 650 | _aMicroelectromechanical systems. | ||
| 942 | _2DDC | ||
| 942 | _cB | ||
| 999 |
_c14691 _d14691 |
||